HOME > Article > DetailSputtering rate measurements of some transition metal silicides and comparison with those of the elementsMichiko Yoshitake, Yasuhiro Yamauchi, Chandra Bose. Surface and Interface Analysis 36 [8] 801-804. 2004.https://doi.org/10.1002/sia.1768 NIMS author(s)YOSHITAKE, MichikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 14:32:53 +0900Updated at: 2024-04-02 06:30:20 +0900