HOME > 論文 > 書誌詳細Through silicon via filling methods with metal/polymer composite for three-dimensional LSIBarbara Horváth, Jin Kawakita, Toyohiro Chikyow. Japanese Journal of Applied Physics 53 [6S] 06JH01. 2014.https://doi.org/10.7567/jjap.53.06jh01 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 17:14:45 +0900更新時刻: 2024-04-02 03:42:16 +0900
