HOME > Article > DetailThrough silicon via filling methods with metal/polymer composite for three-dimensional LSIBarbara Horváth, Jin Kawakita, Toyohiro Chikyow. Japanese Journal of Applied Physics 53 [6S] 06JH01. 2014.https://doi.org/10.7567/jjap.53.06jh01 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:14:45 +0900Updated at: 2024-04-02 03:42:16 +0900
