Problems caused by ion sputtering for the mesh-replica method and causion in measuring sputtered surface profiles | SAMURAI, NIMS Researchers Directory Service

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Problems caused by ion sputtering for the mesh-replica method and causion in measuring sputtered surface profiles

M. Suzuki, KAISE, Masatsugu, KIMURA, Takashi, TANUMA, Shigeo.

JOURNAL OF SURFACE ANALYSIS 12 [2] 178-182. 2005.

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Created at: 2016-05-24 14:49:13 +0900 Updated at: 2018-12-14 23:59:07 +0900

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