SAMURAI - NIMS Researchers Database

HOME > 論文 > 書誌詳細

Etching-induced damage in heavily Mg-doped p-type GaN and its suppression by low-bias-power inductively coupled plasma-reactive ion etching

Takeru Kumabe, Yuto Ando, Hirotaka Watanabe, Manato Deki, Atsushi Tanaka, Shugo Nitta, Yoshio Honda, Hiroshi Amano.

NIMS著者


    Materials Data Repository (MDR)上の本文・データセット


      作成時刻 :2021-06-16 03:00:18 +0900 更新時刻 :2021-06-16 03:01:05 +0900

      ▲ページトップへ移動