HOME > 論文 > 書誌詳細Control of thermal conductivity in amorphous silicon oxide and silicon oxynitride thin films via ubiquitous transition metal dopingMichiko Sasaki, Kunihiko Shizume, Ryohei Nagahiro, Junichiro Shiomi, Masahiro Goto. Japanese Journal of Applied Physics 65 [11] 115502. 2026.https://doi.org/10.35848/1347-4065/ae6e81 NIMS著者佐々木 道子後藤 真宏Materials Data Repository (MDR)上の本文・データセット作成時刻: 2026-09-05 03:05:49 +0900 更新時刻: 2026-10-07 05:47:14 +0900
