HOME > 論文 > 書誌詳細Submicrometer transmission mask fabricated by low-temperature SF6/O2 reactive ion etching and focesed ion beamH-Y.Sheng, FUJITA, Daisuke, 大木泰造, 岡本洋, NEJO, Hitoshi. Journal of Vacuum Science & Technology A . 1997.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:49:15 +0900 更新時刻: 2022-09-05 10:49:15 +0900
