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Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reduction

著者Fatima Zohra Dahmani, Yuji Okamoto, Daiki Tsutsumi, Takamasa Ishigaki, Hideomi Koinuma, Saad Hamzaoui, Samir Flazi, Masatomo Sumiya.
掲載誌名Japanese Journal of Applied Physics 57 [5] 051301
ISSN: 13474065, 00214922
ESIでのカテゴリ: PHYSICS
出版社Japan Society of Applied Physics
発表年2018
言語English
DOIhttps://doi.org/10.7567/jjap.57.051301
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