HOME > 論文 > 書誌詳細Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reductionFatima Zohra Dahmani, Yuji Okamoto, Daiki Tsutsumi, Takamasa Ishigaki, Hideomi Koinuma, Saad Hamzaoui, Samir Flazi, Masatomo Sumiya. Japanese Journal of Applied Physics 57 [5] 051301. 2018.https://doi.org/10.7567/jjap.57.051301 NIMS著者角谷 正友Materials Data Repository (MDR)上の本文・データセット作成時刻: 2018-04-05 21:09:33 +0900更新時刻: 2024-03-30 01:32:34 +0900
