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Detecting Real Oxygen Ions in Polycrystalline Diamond Thin Film using Secondary Ion Mass Spectrometry

Tsubasa Nakagawa, Isao Sakaguchi, Hajime Haneda, Naoki Ohashi, Yuichi Ikuhara.
Japanese Journal of Applied Physics 46 [6A] 3391-3393. 2007.
https://doi.org/10.1143/jjap.46.3391

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