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Development of an Atomic Force Microscope Ultra-Microhardness Tester with a Silicon Tip for High-Resolution AFM Imaging

著者Nobuo NAGASHIMA, Kensuke MIYAHARA, Saburo MATSUOKA.
掲載誌名JSME International Journal Series A 47 [3] 448-456
ISSN: 13447912, 13475363
出版社Japan Society of Mechanical Engineers
発表年2004
言語English
DOIhttps://doi.org/10.1299/jsmea.47.448
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