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Effective silicon production from SiCl4 source using hydrogen radicals generated and transported at atmospheric pressure

Yuji Okamoto, Masatomo Sumiya, Yuya Nakamura, Yoshikazu Suzuki.
Open Access Informa UK Limited (Publisher)

NIMS著者


Materials Data Repository (MDR)上の本文・データセット


    作成時刻 :2020-11-26 03:00:19 +0900 更新時刻 :2021-09-28 22:24:22 +0900

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