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Surface Nitridation ofc-Plane Sapphire Substrate by Near-Atmospheric Nitrogen Plasma
(Surface Nitridation of c-Plane Sapphire Substrate by Near-Atmospheric Nitrogen Plasma)

Takahiro Nagata, Masamitsu Haemori, Junichiro Anzai, Tsuyoshi Uehara, Toyohiro Chikyow.
Japanese Journal of Applied Physics 48 [4] 040206. 2009.
https://doi.org/10.1143/jjap.48.040206

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