Surface Nitridation of<i>c</i>-Plane Sapphire Substrate by Near-Atmospheric Nitrogen Plasma | SAMURAI, NIMS Researchers Directory Service

Scheduled downtime (October 31st and November 1st, 2026) (2026-10-29)

HOME > Article > Detail

Surface Nitridation ofc-Plane Sapphire Substrate by Near-Atmospheric Nitrogen Plasma
(Surface Nitridation of c-Plane Sapphire Substrate by Near-Atmospheric Nitrogen Plasma)

Takahiro Nagata, Masamitsu Haemori, Junichiro Anzai, Tsuyoshi Uehara, Toyohiro Chikyow.

Japanese Journal of Applied Physics 48 [4] 040206. 2009.

https://doi.org/10.1143/jjap.48.040206

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 15:45:51 +0900 Updated at: 2026-10-30 08:47:51 +0900

▲ Go to the top of this page