Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition
(温度変調有機化学堆積法によるZnO薄膜のヘテロエピタキシャル成長)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 15:48:11 +0900Updated at: 2024-04-02 05:44:48 +0900