Investigation of V-shaped extended defects in a 4H–SiC epitaxial film
(Investigation of V-shaped extended defects in a 4H–SiC epitaxial film)
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-06-27 22:20:12 +0900更新時刻: 2025-01-13 05:55:51 +0900