シリコン酸チッ化中の表面応力変動
(Surface stress during plasma oxidation and following Nitridation)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:45:56 +0900 Updated at: 2026-11-01 04:17:46 +0900