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AuthorAkiko N. ITAKURA, Tetsuya NARUSHIMA, Masahiro KITAJIMA.
Title
(Surface Stress during Plasma Oxidation and following Nitridation.)
Journal titleSHINKU 45 [3] 127-129
ISSN: 18809413 05598516
Year of publication2002
LanguageJapanese
DOI10.3131/jvsj.45.127
ESI category
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