Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
( α-Ga2O3における貫通転位のHClガスエッチによる可視化)

Yuichi Oshima, Shingo Yagyu, Takashi Shinohe.

Journal of Crystal Growth 576 126387. 2021.

https://doi.org/10.1016/j.jcrysgro.2021.126387

Open Access Elsevier BV (Publisher) Materials Data Repository (MDR)

NIMS著者

大島祐一

Materials Data Repository (MDR)上の本文・データセット

MDRavailable Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching

作成時刻: 2021-11-02 03:35:32 +0900更新時刻: 2024-10-06 07:09:07 +0900

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