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Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
( α-Ga2O3における貫通転位のHClガスエッチによる可視化)

Yuichi Oshima, Shingo Yagyu, Takashi Shinohe.

Journal of Crystal Growth 576 126387. 2021.

https://doi.org/10.1016/j.jcrysgro.2021.126387

Open Access Materials Data Repository (MDR)

NIMS author(s)

OSHIMA, Yuichi

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching

Created at: 2021-11-02 03:35:32 +0900Updated at: 2024-03-31 13:24:26 +0900

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