Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating

Michiko Sasaki, Yibin Xu, Takao Mori, Masahiro Goto.

Japanese Journal of Applied Physics 65 [7] 07SP32. 2026.

https://doi.org/10.35848/1347-4065/ae5197

Open Access IOP Publishing (Publisher) Materials Data Repository (MDR)

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MDRavailable Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating

作成時刻: 2026-08-20 03:07:12 +0900 更新時刻: 2026-09-21 04:34:32 +0900

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