Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films
| 著者 | Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Shintaro Yasui, Yoshitaka Ehara, Ken Nishida, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yasuhiko Imai, Osami Sakata, Hiroshi Funakubo. |
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| 掲載誌名 | Journal of the Ceramic Society of Japan 130 [7] 21184 ISSN: 13486535 ESIでのカテゴリ: MATERIALS SCIENCE |
| 出版社 | Ceramic Society of Japan |
| 発表年 | 2022 |
| 言語 | English |
| DOI | https://doi.org/10.2109/jcersj2.21184 |
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