Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Shinnosuke Yasuoka; Ryoichi Mizutani; Reika Ota; Takahisa Shiraishi; Takao Shimizu; Shintaro Yasui; Yoshitaka Ehara; Ken Nishida; Masato Uehara; Hiroshi Yamada; Morito Akiyama; Yasuhiko Imai; Osami Sakata; Hiroshi Funakubo; Shinnosuke Yasuoka; Ryoichi Mizutani; Reika Ota; Takahisa Shiraishi; Takao Shimizu; Shintaro Yasui; Yoshitaka Ehara; Ken Nishida; Masato Uehara; Hiroshi Yamada; Morito Akiyama; Yasuhiko Imai; Osami Sakata; Hiroshi Funakubo

doi:10.2109/jcersj2.21184

Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Shintaro Yasui, Yoshitaka Ehara, Ken Nishida, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yasuhiko Imai, Osami Sakata, Hiroshi Funakubo.

Journal of the Ceramic Society of Japan 130 [7] 21184. 2022.

https://doi.org/10.2109/jcersj2.21184

Open Access Ceramic Society of Japan (Publisher)

NIMS author(s)

SHIMIZU, Takao

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-12-29 03:30:01 +0900Updated at: 2024-09-12 07:31:34 +0900