Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films
| Author(s) | Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, SHIMIZU, Takao, Shintaro Yasui, Yoshitaka Ehara, Ken Nishida, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yasuhiko Imai, Osami Sakata, Hiroshi Funakubo, Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Shintaro Yasui, Yoshitaka Ehara, Ken Nishida, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yasuhiko Imai, Osami Sakata, Hiroshi Funakubo. |
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| Journal title | Journal of the Ceramic Society of Japan 130 [7] 21184 ISSN: 13486535 ESI category: MATERIALS SCIENCE |
| Publisher | Ceramic Society of Japan |
| Year of publication | 2022 |
| Language | English |
| DOI | https://doi.org/10.2109/jcersj2.21184 |
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