Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (∼1 × 1016 atoms/cm3) in thin-film samples
(Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration （<1✕1016 atoms/cm3) in thin-film samples)

著者	Taku Hanna, Hidenori Hiramatsu, Isao Sakaguchi, Hideo Hosono.
掲載誌名	Review of Scientific Instruments 88 [5] 053103 ISSN: 00346748, 10897623 ESIでのカテゴリ: CHEMISTRY
出版社	AIP Publishing
発表年	2017
言語	English
DOI	https://doi.org/10.1063/1.4982255
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