Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (∼1 × 1016 atoms/cm3) in thin-film samples
(Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration （<1✕1016 atoms/cm3) in thin-film samples)
| Author(s) | Taku Hanna, Hidenori Hiramatsu, Isao Sakaguchi, Hideo Hosono. |
|---|---|
| Journal title | Review of Scientific Instruments 88 [5] 053103 ISSN: 00346748, 10897623 ESI category: CHEMISTRY |
| Publisher | AIP Publishing |
| Year of publication | 2017 |
| Language | English |
| DOI | https://doi.org/10.1063/1.4982255 |
| Import this reference to Mendeley |  |