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Effect of a seed layer on microstructure and electrical properties of Ga2O3 films on variously oriented Si substrates

Keyun Gu, Zilong Zhang, Ke Tang, Jian Huang, Yi Shang, Yue Shen, Meiyong Liao, Linjun Wang.
Vacuum 195 110671. 2022.

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    作成時刻: 2022-12-22 03:27:45 +0900更新時刻: 2024-10-13 07:02:43 +0900

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