HOME > 論文 > 書誌詳細Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si SurfaceAkira Kurokawa, Tetsuya Narushima, Ken Nakamura, Hidehiko Nonaka, Shingo Ichimura, Akiko N. Itakura, Masahiro Kitajima. Japanese Journal of Applied Physics 43 [1] 281-286. 2004.https://doi.org/10.1143/jjap.43.281 NIMS著者板倉 明子Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 12:03:27 +0900更新時刻: 2024-04-01 23:53:46 +0900
