HOME > Article > DetailEffects of sputtering pressure and oxygen partial pressure on amorphous Ga2O3 film-based solar-blind ultraviolet photodetectorsKeyun Gu, Zilong Zhang, Ke Tang, Jian Huang, Meiyong Liao, Linjun Wang. Applied Surface Science 605 154606. 2022.https://doi.org/10.1016/j.apsusc.2022.154606 NIMS author(s)LIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-11-09 03:23:09 +0900 Updated at: 2026-10-08 07:06:49 +0900