HOME > 論文 > 書誌詳細Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etchingTakayoshi Oshima, Yuichi Oshima. AIP Advances 15 [5] 055207. 2025.https://doi.org/10.1063/5.0260753 Open Access AIP Publishing (Publisher) Materials Data Repository (MDR) NIMS著者大島 孝仁大島 祐一Materials Data Repository (MDR)上の本文・データセットMDRavailable Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching 作成時刻: 2025-05-08 03:07:15 +0900 更新時刻: 2026-04-19 04:32:39 +0900
