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Control of pressure rise in a vacuum chamber by boron nitride and copper somposite coating
(窒化ホウ素ー銅複合膜被服による真空容器内の圧力上昇抑制)

Tetsuo Oishi, Youko Konishi, Masahiro Goto, Akira Kasahara, Masahiro Tosa, Kazuhiro Yoshihara.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 [6] 1873-1876. 2003.

https://doi.org/10.1116/1.1615971

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作成時刻: 2016-05-24 11:56:28 +0900 更新時刻: 2025-04-13 04:15:23 +0900

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