HOME > 論文 > 書誌詳細Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO2 Thin FilmsYoshiki Maekawa, Koji Hirai, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo. ACS Applied Electronic Materials 5525-5535. 2024.https://doi.org/10.1021/acsaelm.4c00368 Open Access American Chemical Society (ACS) (Publisher) Materials Data Repository (MDR) NIMS著者清水 荘雄Materials Data Repository (MDR)上の本文・データセットMDRavailable Strain Control of (001)-Polar-Axis-Oriented Epitaxial Y-Doped HfO<sub>2</sub> Thin Films 作成時刻: 2024-12-14 03:16:19 +0900 更新時刻: 2026-05-03 08:59:23 +0900
