HOME > 論文 > 書誌詳細Phase Identification of 850 nm Thick 7%YO1.5–93%HfO2 Films by Surface and Cross-Sectional Raman SpectroscopiesTakanori Mimura, Yuma Takahashi, Takahisa Shiraishi, Masanori Kodera, Reijiro Shimura, Keisuke Ishihama, Kazuki Okamoto, Hiroki Moriwake, Ayako Taguchi, Takao Shimizu, Yasuhiro Fujii, Akitoshi Koreeda, Hiroshi Funakubo. ACS Applied Electronic Materials 6 [4] 2500-2506. 2024.https://doi.org/10.1021/acsaelm.4c00134 Open Access American Chemical Society (ACS) (Publisher) Materials Data Repository (MDR) NIMS著者清水 荘雄Materials Data Repository (MDR)上の本文・データセットMDRavailable Phase Identification of 850 nm Thick 7%YO<sub>1.5</sub>–93%HfO<sub>2</sub> Films by Surface and Cross-Sectional Raman Spectroscopies 作成時刻: 2024-12-14 03:16:21 +0900 更新時刻: 2026-05-03 08:59:25 +0900
