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Polarity Control of an All-Sputtered Epitaxial GaN/AlN/Al Film on a Si(111) Substrate by Intermediate Oxidization

Takahiro Nagata, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Liwen Sang, Toyohiro Chikyow.
ACS Omega 7 [23] 19380-19387. 2022.
https://doi.org/10.1021/acsomega.2c00957
Open Access American Chemical Society (ACS) (Publisher)

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    Created at: 2022-09-07 03:24:35 +0900Updated at: 2024-05-01 08:48:04 +0900

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