HOME > 論文 > 書誌詳細HIGH-RATE GROWTH OF HIGH-QUALITY MICROCRYSTALLINE SILICON FILMS FROM PLASMA BY INTERCONNECTED MULTI-HOLLOW CATHODENIIKURA, Chisato, 板垣奈穂, 松田彰久. SURFACE & COATINGS TECHNOLOGY 5463-5467. 2007.NIMS著者新倉 ちさとMaterials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-21 22:15:08 +0900更新時刻: 2022-10-21 22:15:08 +0900