HOME > 論文 > 書誌詳細Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin filmsShinnosuke Yasuoka, Takao Shimizu, Akinori Tateyama, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo. Journal of Applied Physics 128 [11] 114103. 2020.https://doi.org/10.1063/5.0015281 NIMS著者清水 荘雄Materials Data Repository (MDR)上の本文・データセット作成時刻: 2020-10-10 03:00:23 +0900更新時刻: 2025-01-09 05:45:36 +0900
