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Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films

Shinnosuke Yasuoka, Takao Shimizu, Akinori Tateyama, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo.
Journal of Applied Physics 128 [11] 114103. 2020.

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