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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application

著者B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto.
掲載誌名Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 272 183-187
ISSN: 0168583X
ESIでのカテゴリ: PHYSICS
出版社Elsevier BV
発表年2012
言語English
DOIhttps://doi.org/10.1016/j.nimb.2011.01.061
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