HOME > 論文 > 書誌詳細FIB Fabrication and Irradiation Test of Stencil Masks for Heavy-Ion Patterned Implantation for plasmonic applicationB. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 272 183-187. 2012.NIMS著者武田 良彦岸本 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2018-06-08 21:07:03 +0900更新時刻: 2020-11-16 23:20:53 +0900