HOME > Article > DetailFIB Fabrication and Irradiation Test of Stencil Masks for Heavy-Ion Patterned Implantation for plasmonic applicationB. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 272 183-187. 2012.NIMS author(s)TAKEDA, YoshihikoKISHIMOTO, NaokiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2018-06-08 21:07:03 +0900Updated at: 2020-11-16 23:20:53 +0900