Mass spectrometric studies of low pressure CH4, CH4/H2, and H2 plasma beams generated by an inductively coupled radio frequency | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Mass spectrometric studies of low pressure CH4, CH4/H2, and H2 plasma beams generated by an inductively coupled radio frequency
(質量分析法による低圧誘導結合CH4, CH4/H2及びH2プラズマビームの特性)

Katsuyuki Okada, Shojiro Komatsu.

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20 [6] 1835. 2002.

https://doi.org/10.1116/1.1506171

NIMS著者

岡田勝行

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 11:49:33 +0900 更新時刻: 2026-10-01 05:21:36 +0900

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