HOME > 論文 > 書誌詳細Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography PatterningVanessa Proust, Quentin Kirscher, Thi Kim Ngan Nguyen, Lisa Obringer, Kento Ishii, Ludivine Rault, Valérie Demange, David Berthebaud, Naoki Ohashi, Tetsuo Uchikoshi, Dominique Berling, Olivier Soppera, Fabien Grasset. Nanomaterials 12 [14] 2334. 2022.https://doi.org/10.3390/nano12142334 Open Access MDPI AG (Publisher) NIMS著者大橋 直樹打越 哲郎Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-03 03:17:58 +0900 更新時刻: 2025-04-12 09:08:16 +0900