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Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning

Vanessa Proust, Quentin Kirscher, Thi Kim Ngan Nguyen, Lisa Obringer, Kento Ishii, Ludivine Rault, Valérie Demange, David Berthebaud, Naoki Ohashi, Tetsuo Uchikoshi, Dominique Berling, Olivier Soppera, Fabien Grasset.

Nanomaterials 12 [14] 2334. 2022.

Open Access MDPI AG (Publisher)

作成時刻: 2022-09-03 03:17:58 +0900更新時刻: 2024-03-31 17:26:36 +0900