Silicon Microstructure Fabricated by Laser Micro-Patterning Method Combined with Wet Etching Process | SAMURAI, NIMS Researchers Directory Service

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Silicon Microstructure Fabricated by Laser Micro-Patterning Method Combined with Wet Etching Process

T. Oishi, M. Goto, Y. Pihosh, A. Kasahara, M. Tosa.

Applied Surface Science 241 [1-2] 223-226. 2005.

https://doi.org/10.1016/j.apsusc.2004.09.044

NIMS author(s)

GOTO, Masahiro

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-02-26 19:38:23 +0900 Updated at: 2026-10-03 05:06:42 +0900

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