HOME > 論文 > 書誌詳細Surface stress control using ultraviolet light irradiation of plasma-polymerized thin filmsShinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Anye N. Chifen, Renate Förch, Rüdiger Berger. Applied Physics Letters 88 [14] 143119. 2006.https://doi.org/10.1063/1.2183807 NIMS著者板倉 明子Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 14:46:43 +0900更新時刻: 2024-04-01 20:58:46 +0900
