HOME > Article > DetailSurface stress control using ultraviolet light irradiation of plasma-polymerized thin filmsShinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Anye N. Chifen, Renate Förch, Rüdiger Berger. Applied Physics Letters 88 [14] 143119. 2006.https://doi.org/10.1063/1.2183807 NIMS author(s)ITAKURA, AkikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2016-05-24 14:46:43 +0900 Updated at :2020-11-16 22:58:35 +0900