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Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films

Masuaki Matsumoto, Tomohiro Okada, Tetsuya Miyazawa, Kazuhiko Mase, Misao Yamanaka, Ayako Hashimoto, Markus Wilde, Katsuyuki Fukutani.
Journal of Vacuum Science & Technology A 37 [5] 051601. 2019.
https://doi.org/10.1116/1.5108983

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    Created at: 2019-10-19 03:00:21 +0900Updated at: 2024-05-01 04:58:11 +0900

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