HOME > 論文 > 書誌詳細Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modificationKohei Tuzuku, Masataka Imura, Hironori Okumura. Japanese Journal of Applied Physics 64 [6] 066504. 2025.https://doi.org/10.35848/1347-4065/adde9a Open Access Materials Data Repository (MDR) NIMS著者井村 将隆Materials Data Repository (MDR)上の本文・データセットMDRavailable Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification 作成時刻: 2025-08-20 03:12:20 +0900 更新時刻: 2026-11-04 07:08:58 +0900