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Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification

Kohei Tuzuku, Masataka Imura, Hironori Okumura.

Japanese Journal of Applied Physics 64 [6] 066504. 2025.

https://doi.org/10.35848/1347-4065/adde9a

Open Access Materials Data Repository (MDR)

NIMS author(s)

IMURA, Masataka

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification

Created at: 2025-08-20 03:12:20 +0900 Updated at: 2026-10-03 07:07:38 +0900

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