Takeshi Hatano; Keikichi Nakamura; Yuji Asada; Keiichi Ogawa; Atsushi Oguchi

doi:10.1143/jjap.25.912

Characterization of Cu/Ti Multi-Layered Structure by Improved Sputter Crater Method

著者	Takeshi Hatano, Keikichi Nakamura, Yuji Asada, Keiichi Ogawa, Atsushi Oguchi.
掲載誌名	Japanese Journal of Applied Physics 25 [Part 1, No. 6] 912-913
出版社	Japan Society of Applied Physics
発表年	1986
言語	English
DOI	https://doi.org/10.1143/jjap.25.912
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