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Characterization of Cu/Ti Multi-Layered Structure by Improved Sputter Crater Method

Takeshi Hatano, 中村恵吉, 浅田雄司, 小川恵一, 小口醇, Keikichi Nakamura, Yuji Asada, Keiichi Ogawa, Atsushi Oguchi.
Japanese Journal of Applied Physics 25 [Part 1, No. 6] 912-913. 1986.

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    Created at :2016-05-24 11:28:58 +0900 Updated at :2020-11-16 22:53:16 +0900

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