HOME > Article > DetailFast Formation of Conductive Material by Simultaneous Chemical Process for Infilling Through-Silicon ViaJin Kawakita, Toyohiro Chikyow. Japanese Journal of Applied Physics 51 06FG11. 2012.https://doi.org/10.1143/jjap.51.06fg11 NIMS author(s)KAWAKITA, JinFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:39:04 +0900 Updated at: 2026-11-09 05:00:17 +0900