HOME > 論文 > 書誌詳細Linear Stiffness Tuning in MEMS Devices via Prestress Introduced by TiN Thin FilmsChao Zhuang, Kosuke Minami, Kota Shiba, Genki Yoshikawa. ACS Applied Engineering Materials 1 [4] 1213-1219. 2023.https://doi.org/10.1021/acsaenm.3c00034 NIMS著者南 皓輔柴 弘太吉川 元起Materials Data Repository (MDR)上の本文・データセット作成時刻: 2023-12-24 03:14:49 +0900 更新時刻: 2026-10-08 08:56:45 +0900
