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Linear Stiffness Tuning in MEMS Devices via Prestress Introduced by TiN Thin Films

Chao Zhuang, Kosuke Minami, Kota Shiba, Genki Yoshikawa.
ACS Applied Engineering Materials 1 [4] 1213-1219. 2023.
https://doi.org/10.1021/acsaenm.3c00034

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    Created at: 2023-12-24 03:14:49 +0900 Updated at: 2026-09-07 08:47:26 +0900

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