<i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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In-plane lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO₃(111) substrates via reactive magnetron sputtering

Kota Hasegawa, Takao Shimizu, Naoki Ohashi.

Journal of the Ceramic Society of Japan 131 [7] 23002. 2023.

https://doi.org/10.2109/jcersj2.23002

Open Access Ceramic Society of Japan (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2023-11-01 03:13:29 +0900更新時刻: 2025-03-19 07:11:27 +0900

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