<i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering | SAMURAI, NIMS Researchers Directory Service

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In-plane lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO₃(111) substrates via reactive magnetron sputtering

Kota Hasegawa, Takao Shimizu, Naoki Ohashi.

Journal of the Ceramic Society of Japan 131 [7] 23002. 2023.

https://doi.org/10.2109/jcersj2.23002

Open Access Ceramic Society of Japan (Publisher) Materials Data Repository (MDR)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable <i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering

Created at: 2023-11-01 03:13:29 +0900 Updated at: 2026-01-29 07:06:53 +0900

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