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In-plane lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO3(111) substrates via reactive magnetron sputtering

Kota Hasegawa, Takao Shimizu, Naoki Ohashi.
Open Access Ceramic Society of Japan (Publisher)

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2023-11-01 03:13:29 +0900Updated at: 2024-05-03 11:59:49 +0900

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