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In-plane lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO3(111) substrates via reactive magnetron sputtering

Kota Hasegawa, Takao Shimizu, Naoki Ohashi.
Journal of the Ceramic Society of Japan 131 [7] 23002. 2023.
https://doi.org/10.2109/jcersj2.23002
Open Access Ceramic Society of Japan (Publisher)

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