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An ultra-high vacuum system for fabricating clean two-dimensional material devices

Author(s)Shuaifei Guo, Mingyan Luo, Gang Shi, Ning Tian, Zhe Huang, Fangyuan Yang, Liguo Ma, Nai Zhou Wang, Qinzhen Shi, Kailiang Xu, Zihan Xu, Kenji Watanabe, Takashi Taniguchi, Xian Hui Chen, Dawei Shen, Liyuan Zhang, Wei Ruan, Yuanbo Zhang.
Journal titleReview of Scientific Instruments 94 [1] 013903
ISSN: 00346748, 10897623
ESI category: CHEMISTRY
PublisherAIP Publishing
Year of publication2023
LanguageEnglish
DOIhttps://doi.org/10.1063/5.0110875
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